DIN 32564-1
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
active, Most Current
| Organization: | DIN |
| Publication Date: | 1 May 2004 |
| Status: | active |
| Page Count: | 6 |
| ICS Code (Precision mechanics): | 39.020 |
| ICS Code (Precision mechanics. Jewellery (Vocabularies)): | 01.040.39 |
Document History
DIN 32564-1
May 1, 2004
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
A description is not available for this item.
June 1, 2003
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
A description is not available for this item.