VDI/VDE 2656 BLATT 1
Determination of geometrical quantities by using of scanning probe microscopes - Calibration of measurement systems
active, Most Current
| Organization: | VDI |
| Publication Date: | 1 September 2019 |
| Status: | active |
| Page Count: | 81 |
| ICS Code (Linear and angular measurements in general): | 17.040.01 |
| ICS Code (Mechanical testing): | 19.060 |
Document History
VDI/VDE 2656 BLATT 1
September 1, 2019
Determination of geometrical quantities by using of scanning probe microscopes - Calibration of measurement systems
A description is not available for this item.
June 1, 2008
Determination of geometrical quantities by using of Scanning Probe Microscopes - Calibration of measurement systems
This guideline is restricted to scanning probe microscopes and their calibration. A scanning probe microscope is a serially operating measuring device which uses a probe of adequate fineness to trace...