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VDI/VDE 2656 BLATT 1

Determination of geometrical quantities by using of scanning probe microscopes - Calibration of measurement systems

active, Most Current
Organization: VDI
Publication Date: 1 September 2019
Status: active
Page Count: 81
ICS Code (Linear and angular measurements in general): 17.040.01
ICS Code (Mechanical testing): 19.060

Document History

VDI/VDE 2656 BLATT 1
September 1, 2019
Determination of geometrical quantities by using of scanning probe microscopes - Calibration of measurement systems
A description is not available for this item.
June 1, 2008
Determination of geometrical quantities by using of Scanning Probe Microscopes - Calibration of measurement systems
This guideline is restricted to scanning probe microscopes and their calibration. A scanning probe microscope is a serially operating measuring device which uses a probe of adequate fineness to trace...

References

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