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ASTM International - ASTM E1634-11(2019)

Standard Guide for Performing Sputter Crater Depth Measurements

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Organization: ASTM International
Publication Date: 1 November 2019
Status: active
Page Count: 3
ICS Code (Physicochemical methods of analysis): 71.040.50
significance And Use:

4.1 Sputter crater depth measurements are performed in order to determine a sputter rate (depth/time) for each matrix sputtered during a sputter depth profile or similar in-depth type analyses.... View More

scope:

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Document History

ASTM E1634-11(2019)
November 1, 2019
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
November 1, 2011
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
June 1, 2007
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
April 10, 2002
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
April 10, 2002
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
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