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ASTM International - ASTM E1634-02(2007)

Standard Guide for Performing Sputter Crater Depth Measurements

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Organization: ASTM International
Publication Date: 1 June 2007
Status: inactive
Page Count: 3
ICS Code (Physicochemical methods of analysis): 71.040.50
significance And Use:

Sputter crater depth measurements are performed in order to determine a sputter rate (depth/time) for each matrix sputtered during a sputter depth profile or similar in-depth type analyses. From... View More

scope:

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

November 1, 2019
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
November 1, 2011
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
ASTM E1634-02(2007)
June 1, 2007
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
April 10, 2002
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
April 10, 2002
Standard Guide for Performing Sputter Crater Depth Measurements
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage,...
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