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BSI - BS EN 62047-4

Semiconductor devices - Micro-electromechanical devices Part 4: Generic specification for MEMS

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Organization: BSI
Publication Date: 30 November 2010
Status: active
Page Count: 24
ICS Code (Other semiconductor devices): 31.080.99

Document History

BS EN 62047-4
November 30, 2010
Semiconductor devices - Micro-electromechanical devices Part 4: Generic specification for MEMS
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References

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