DIN EN 62047-17
Semiconductor devices - Micro- electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin film (IEC 47F/78/CD:2011)
inactive
| Organization: | DIN |
| Publication Date: | 1 June 2011 |
| Status: | inactive |
| Page Count: | 45 |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
December 1, 2015
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (IEC 62047-17:2015); German version EN 62047-17:2015
In diesem Teil der IEC 62047 ist das Verfahren für die Durchführung von Wölbungsprüfungen (Bulge-/Tiefen- Prüfungen) an einer freistehenden Schicht, die innerhalb eines Fensters gewölbt wird,...
DIN EN 62047-17
June 1, 2011
Semiconductor devices - Micro- electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin film (IEC 47F/78/CD:2011)
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