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DIN - VDI/VDE 2655 BLATT 1.3

Optische Messtechnik an Mikrotopografien - Kalibrieren von flaechenhaft messenden Interferometern und Interferenzmikroskopen fuer die Formmessung

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Organization: DIN
Publication Date: 1 February 2020
Status: active
Page Count: 50
ICS Code (Optics and optical measurements in general): 17.180.01

Document History

VDI/VDE 2655 BLATT 1.3
February 1, 2020
Optische Messtechnik an Mikrotopografien - Kalibrieren von flaechenhaft messenden Interferometern und Interferenzmikroskopen fuer die Formmessung
A description is not available for this item.
VDI/VDE 2655 BLATT 1.3
March 1, 2018
Optische Messtechnik an Mikrotopographien - Kalibrieren von flaechenhaft messenden Interferometern und Interferenzmikroskopen fuer die Formmessung
A description is not available for this item.

References

This document is referenced by:
ISO 25178-604 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of noncontact (coherence scanning interferometry) instruments
Published by ISO on August 1, 2013
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
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