ISO 25178-604
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of noncontact (coherence scanning interferometry) instruments
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Organization: | ISO |
Publication Date: | 1 August 2013 |
Status: | active |
Page Count: | 48 |
ICS Code (Properties of surfaces): | 17.040.20 |
scope:
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
Document History
October 5, 2023
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
This document describes the design and metrological characteristics of coherence scanning interferometry systems for areal measurement of surface topography. Because surface profiles can be extracted...
ISO 25178-604
August 1, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of noncontact (coherence scanning interferometry) instruments
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.