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ISO - DIS 25178-604

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments

pending
Organization: ISO
Publication Date: 5 October 2023
Status: pending
Page Count: 29
ICS Code (Properties of surfaces): 17.040.20
scope:

This document describes the design and metrological characteristics of coherence scanning interferometry systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document can be applied to profiling measurements as well.

Document History

DIS 25178-604
October 5, 2023
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
This document describes the design and metrological characteristics of coherence scanning interferometry systems for areal measurement of surface topography. Because surface profiles can be extracted...
ISO 25178-604
August 1, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of noncontact (coherence scanning interferometry) instruments
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

References

This document references:
ISO 10934-1 - Optics and optical instruments - Vocabulary for microscopy - Part 1: Light microscopy
Published by ISO on December 15, 2002
A description is not available for this item.
This document references:
ISO 14253-1 - Geometrical product specifications (GPS) - Inspection by measurement of workpieces and measuring equipment - Part 1: Decision rules for verifying conformity or nonconformity with specifications
Published by ISO on October 1, 2017
This document establishes the rules for verifying the conformity or nonconformity with a given tolerance for a characteristic of a workpiece (or a population of workpieces) or with a given maximum...
This document references:
ISO 14638 - Geometrical product specifications (GPS) - Matrix model
Published by ISO on January 15, 2015
This International Standard is a fundamental ISO GPS standard. It explains the concept of Geometrical Product Specification (ISO GPS), and provides a framework to illustrate how current and future...
This document references:
ISO 25178-600 - Geometrical product specifications (GPS) — Surface texture: Areal — Part 600: Metrological characteristics for areal topography measuring methods
Published by ISO on February 1, 2019
This document specifies the metrological characteristics of areal instruments for measuring surface topography. Because surface profiles can be extracted from surface topography images, most of the...
This document references:
ISO 25178-607 - Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
Published by ISO on March 1, 2019
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted...
This document references:
25178-700 - Geometrical product specifications (GPS) — Surface texture: Areal — Part 700: Calibration, adjustment and verification of areal topography measuring instruments
Published by ISO on December 1, 2022
This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in...
This document references:
ISO 8015 - Geometrical product specifications (GPS) — Fundamentals — Concepts, principles and rules
Published by ISO on June 1, 2011
This International Standard specifies fundamental concepts, principles and rules valid for the creation, interpretation and application of all other International Standards, Technical Specifications...
This document references:
ISO TR 14999-1 - Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 1: Terms, definitions and fundamental relationships
Published by ISO on March 1, 2005
A description is not available for this item.
This document references:
ISO TR 14999-2 - Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 2: Measurement and evaluation techniques
Published by ISO on July 1, 2019
This document gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports...
This document references:
VDI/VDE 2655 BLATT 1.3 - Optische Messtechnik an Mikrotopografien - Kalibrieren von flaechenhaft messenden Interferometern und Interferenzmikroskopen fuer die Formmessung
Published by DIN on February 1, 2020
A description is not available for this item.
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