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VDI/VDE 2655 BLATT 1.3

Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

active, Most Current
Organization: VDI
Publication Date: 1 February 2020
Status: active
Page Count: 50
ICS Code (Optics and optical measurements in general): 17.180.01

Document History

VDI/VDE 2655 BLATT 1.3
February 1, 2020
Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement
A description is not available for this item.

References

This document references:
ISO 4287 - Geometrical Product Specifications (GPS) - Surface Texture: Profile Method - Terms, Definitions and Surface Texture Parameters
Published by ISO on April 1, 1997
This International Standard specifies terms, definitions and parameters for the determination of surface texture (roughness, waviness and primary profile) by profiling methods.
This document references:
ISO 12179 - Geometrical Product Specifications (GPS) - Surface Texture: Profile Method - Calibration of Contact (Stylus) Instruments
Published by ISO on March 15, 2000
A description is not available for this item.
This document references:
ISO 5436-1 - Geometrical Product Specifications (GPS) - Surface Texture: Profile Method; Measurement Standards - Part 1: Material Measures
Published by ISO on March 15, 2000
A description is not available for this item.
This document references:
ISO 3274 - Geometrical Products Specifications (GPS) - Surface Texture: Profile Method - Nominal Characteristics of Contact (Stylus) Instruments
Published by ISO on December 1, 1996
This International Standard defines profiles and the general structure of contact (stylus) instruments for measuring surface roughness and waviness, enabling existing International Standards to be...
This document references:
ISO 4288 - Geometrical Product Specifications (GPS) — Surface texture: Profile method — Rules and procedures for the assessment of surface texture TECHNICAL CORRIGENDUM 1
Published by ISO on June 15, 1998
This International Standard specifies the rules for comparison of the measured values with the tolerance limits for surface texture parameters defined in ISO 4287, ISO 12085, ISO 13565-2 and ISO...
This document is referenced by:
25178-700 - Geometrical product specifications (GPS) — Surface texture: Areal — Part 700: Calibration, adjustment and verification of areal topography measuring instruments
Published by ISO on December 1, 2022
This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in...
This document is referenced by:
SN EN ISO 25178-700 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 700: Calibration, adjustment and verification of areal topography measuring instruments
Published by SNV on January 1, 2023
This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in...
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