DSF/ISO/FDIS 23131
Ellipsometry – Principles
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| Organization: | DS |
| Status: | active |
| Page Count: | 23 |
| ICS Code (Metrology and measurement in general): | 17.020 |
scope:
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Document History
April 27, 2021
Ellipsometry – Principles
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...
DSF/ISO/FDIS 23131
Ellipsometry – Principles
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...