DS/ISO 23131
Ellipsometry – Principles
active, Most Current
| Organization: | DS |
| Publication Date: | 27 April 2021 |
| Status: | active |
| Page Count: | 24 |
| ICS Code (Metrology and measurement in general): | 17.020 |
scope:
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Document History
DS/ISO 23131
April 27, 2021
Ellipsometry – Principles
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...
Ellipsometry – Principles
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...