IEC TR 63258
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
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| Organization: | IEC |
| Publication Date: | 1 March 2021 |
| Status: | active |
| Page Count: | 26 |
| ICS Code (Nanotechnologies): | 07.120 |
scope:
This document, which is a Technical Report, is focused on the practical protocol ellipsometr
This document includes
- outlines of the ellipsometry procedures,
- methods of interpretations of results and discussion of data analysis, and
- case studies.
Document History
IEC TR 63258
March 1, 2021
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
This document, which is a Technical Report, is focused on the practical protocol ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the...