ISO - TS 22933
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
active, Most Current
| Organization: | ISO |
| Publication Date: | 1 April 2022 |
| Status: | active |
| Page Count: | 22 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
Document History
TS 22933
April 1, 2022
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS,...