ESD - STM11.11
The Protection of Electrostatic Discharge Susceptible Items Surface Resistance Measurement of Planar Materials
Organization: | ESD |
Publication Date: | 2 March 2022 |
Status: | active |
Page Count: | 19 |
scope:
This standard test method defines a direct current measurement to determine the surface resistance of planar materials, without regard to the conduction mechanism. This procedure is intended for measuring the surface resistance of materials that are ≥ 1.0 x 104 ohms and < 1.0 x 1011 ohms.
NOTE: This test method has been shown to have a repeatability of approximately one-half order of magnitude through inter-laboratory tests.
Purpose
This standard test method defines the test procedure, equipment, sample preparation, and conditioning needed to achieve reproducible surface resistance measurements.