ISO - DIS 14594
Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
Organization: | ISO |
Publication Date: | 17 May 2023 |
Status: | pending |
Page Count: | 23 |
ICS Code (Physicochemical methods of analysis): | 71.040.50 |
scope:
This International Standard gives the general guidelines for the determination of experimental parameters relating to the electron probe, the wavelength spectrometer, and the specimen that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of probe current, probe diameter, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.
This International Standard is intended for the analysis of a well-polished specimen using normal beam incidence.
This International Standard is not designed to be used for energy dispersive X-ray spectroscopy.