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ISO 14594

Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

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Organization: ISO
Publication Date: 15 October 2014
Status: active
Page Count: 24
ICS Code (Physicochemical methods of analysis): 71.040.50
scope:

This International Standard gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer, and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.

This International Standard is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained can only be indicative for other experimental conditions.

This International Standard is not designed to be used for energy dispersive X-ray spectroscopy.

Document History

ISO 14594
October 15, 2014
Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
This International Standard gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer, and the sample that need to be...
February 15, 2009
Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy — TECHNICAL CORRIGENDUM 1
A description is not available for this item.
August 1, 2003
Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
A description is not available for this item.

References

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