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ISO - 29301

Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures

active, Most Current
Organization: ISO
Publication Date: 1 October 2023
Status: active
Page Count: 52
ICS Code (Optical equipment): 37.020
scope:

This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon.

This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar.

This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

Document History

29301
October 1, 2023
Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration...
December 1, 2017
Microbeam analysis - Analytical electron microscopy - Methods for calibrating image magnification by using reference materials with periodic structures
This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration...
June 1, 2010
Microbeam analysis — Analytical transmission electron microscopy — Methods for calibrating image magnification by using reference materials having periodic structures
This International Standard specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used...

References

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