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BSI - BS EN 62047-1

Semiconductor devices Micro-electromechanical devices Part 1: Terms and definitions

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Organization: BSI
Publication Date: 29 September 2006
Status: inactive
Page Count: 28
ICS Code (Other semiconductor devices): 31.080.99
ICS Code (Electronics (Vocabularies)): 01.040.31

Document History

BS EN 62047-1
April 30, 2016
Semiconductor devices Micro-electromechanical devices Part 1: Terms and definitions
A description is not available for this item.
BS EN 62047-1
September 29, 2006
Semiconductor devices Micro-electromechanical devices Part 1: Terms and definitions
A description is not available for this item.

References

This document is referenced by:
BS EN 62047-14 - Semiconductor devices - Micro-electromechanical devices Part 14: Forming limit measuring method of metallic film materials
Published by BSI on May 31, 2012
A description is not available for this item.
This document is referenced by:
BS EN 60876-1 - Fibre optic interconnecting devices and passive components - Fibre optic spatial switches Part 1: Generic specification
Published by BSI on October 31, 2014
A description is not available for this item.

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