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BSI - BS EN 62047-1

Semiconductor devices Micro-electromechanical devices Part 1: Terms and definitions

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Organization: BSI
Publication Date: 30 April 2016
Status: active
Page Count: 36
ICS Code (Other semiconductor devices): 31.080.99

Document History

BS EN 62047-1
April 30, 2016
Semiconductor devices Micro-electromechanical devices Part 1: Terms and definitions
A description is not available for this item.
BS EN 62047-1
September 29, 2006
Semiconductor devices Micro-electromechanical devices Part 1: Terms and definitions
A description is not available for this item.

References

This document references:
IEC 62047-1 - Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
Published by IEC on January 1, 2016
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices
This document references:
IEC 60050-521 - AMENDMENT 2 International Electrotechnical Vocabulary (IEV) – Part 521: Semiconductor devices and integrated circuits
Published by IEC on December 1, 2018
A description is not available for this item.
This document references:
IEC 60050-521 - AMENDMENT 2 International Electrotechnical Vocabulary (IEV) – Part 521: Semiconductor devices and integrated circuits
Published by IEC on December 1, 2018
A description is not available for this item.
This document references:
IEC 60050-815 - AMENDMENT 2 International Electrotechnical Vocabulary (IEV) – Part 815: Superconductivity
Published by IEC on April 1, 2020
A description is not available for this item.
This document references:
IEC 60050-815 - AMENDMENT 2 International Electrotechnical Vocabulary (IEV) – Part 815: Superconductivity
Published by IEC on April 1, 2020
A description is not available for this item.
This document is referenced by:
BS EN 62047-14 - Semiconductor devices - Micro-electromechanical devices Part 14: Forming limit measuring method of metallic film materials
Published by BSI on May 31, 2012
A description is not available for this item.
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