DIN 32567-2
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures
inactive
| Organization: | DIN |
| Publication Date: | 1 July 2012 |
| Status: | inactive |
| Page Count: | 14 |
| ICS Code (Precision mechanics): | 39.020 |
Document History
October 1, 2014
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures
DIN 32567 beschreibt systematische Einflüsse und Abweichungen bei der Messung von Schichtdicken und Stufenhöhen von Mikrostrukturen aus inhomogenen Materialien mit ausgewählten taktilen und optischen...
DIN 32567-2
July 1, 2012
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures
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