DIN 32567-3
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
inactive
| Organization: | DIN |
| Publication Date: | 1 July 2012 |
| Status: | inactive |
| Page Count: | 30 |
| ICS Code (Precision mechanics): | 39.020 |
Document History
October 1, 2014
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
DIN 32567 beschreibt systematische Einflüsse und Abweichungen bei der Messung von Schichtdicken und Stufenhöhen von Mikrostrukturen aus inhomogenen Materialien mit ausgewählten taktilen und optischen...
DIN 32567-3
July 1, 2012
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
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