DIN EN 62047-21
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 47F/127/CD:2012)
inactive
| Organization: | DIN |
| Publication Date: | 1 November 2012 |
| Status: | inactive |
| Page Count: | 24 |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
April 1, 2015
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014
In diesem Teil der IEC 62047 ist ein Verfahren zur Bestimmung der Querkontraktionszahl (Poissonzahl) auf der Grundlage von Messwerten festgelegt, die erhalten werden, wenn einachsige (uniaxiale) und...
DIN EN 62047-21
November 1, 2012
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 47F/127/CD:2012)
A description is not available for this item.