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DIN EN 62047-22

Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates (IEC 47F/128/CD:2012)

inactive
Organization: DIN
Publication Date: 1 November 2012
Status: inactive
Page Count: 14
ICS Code (Electromechanical components in general): 31.220.01
ICS Code (Semiconductor devices in general): 31.080.01

Document History

April 1, 2015
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates (IEC 62047-22:2014); German version EN 62047-22:2014
Dieser Teil der IEC 62047 legt ein Zug-Prüfverfahren fest, um elektromechanische Eigenschaften von leitfähigen dünnen Werkstoffen der Mikrosystemtechnik (MEMS) (en: micro-electromechanical systems)...
DIN EN 62047-22
November 1, 2012
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates (IEC 47F/128/CD:2012)
A description is not available for this item.
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