BSI - BS PD ISO/TR 19319
Surface chemical analysis - Fundamental approaches to determination of lateral resolution in beam-based methods
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| Organization: | BSI |
| Publication Date: | 31 March 2013 |
| Status: | active |
| Page Count: | 126 |
| ICS Code (Chemical analysis): | 71.040.40 |
Document History
BS PD ISO/TR 19319
March 31, 2013
Surface chemical analysis - Fundamental approaches to determination of lateral resolution in beam-based methods
A description is not available for this item.
April 5, 2005
Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution, analysis area, and sample area viewed by the analyser
A description is not available for this item.