ISO 13424
Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis
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| Organization: | ISO |
| Publication Date: | 1 October 2013 |
| Status: | active |
| Page Count: | 54 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
Document History
ISO 13424
October 1, 2013
Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis
This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical...