DIN EN ISO 25178-604
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)
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| Organization: | DIN |
| Publication Date: | 1 December 2013 |
| Status: | active |
| Page Count: | 47 |
| ICS Code (Geometrical Product Specification (GPS)): | 17.040.40 |
scope:
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
Document History
November 1, 2023
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023); German and English version prEN ISO 25178-604:2023
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DIN EN ISO 25178-604
December 1, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.