Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
|Publication Date:||27 January 2012|
|ICS Code (Chemical analysis):||71.040.40|
This International Standard is designed to allow the user to assess, on a regular basis, several key parameters of an X‑ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently. Aspects of instrument behaviour covered by this International Standard include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the X‑ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this International Standard. The standard is intended for use with commercial X‑ray photoelectron spectrometers equipped with a monochromated Al Kα X‑ray source or with an unmonochromated Al or Mg Kα X‑ray source.