ISO TR 19319
Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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| Organization: | ISO |
| Publication Date: | 15 March 2013 |
| Status: | active |
| Page Count: | 124 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
This Technical Report describes:
a) Functions and their relevance to lateral resolution:
1) Point spread function (PSF)
2) Line spread function (LSF)
3) Edge spread function (ESF)
4) Modulation transfer function (MTF)
5) Contrast transfer function (CTF)
b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:
1) Imaging of a narrow stripe
2) Imaging of a sharp edge
3) Imaging of square-wave gratings
c) Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy - see Clauses 5 and 6.
Document History
ISO TR 19319
March 15, 2013
Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
This Technical Report describes:
a) Functions and their relevance to lateral resolution:
1) Point spread function (PSF)
2) Line spread function (LSF)
3) Edge spread function (ESF)
4) Modulation...
December 1, 2003
Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution, analysis area, and sample area viewed by the analyser
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