ISO TR 19319
Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution, analysis area, and sample area viewed by the analyser
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| Organization: | ISO |
| Publication Date: | 1 December 2003 |
| Status: | inactive |
| Page Count: | 24 |
| ICS Code (Chemical analysis): | 71.040.40 |
Document History
March 15, 2013
Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
This Technical Report describes:
a) Functions and their relevance to lateral resolution:
1) Point spread function (PSF)
2) Line spread function (LSF)
3) Edge spread function (ESF)
4) Modulation...
ISO TR 19319
December 1, 2003
Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution, analysis area, and sample area viewed by the analyser
A description is not available for this item.