ASTM International - ASTM F24-00
Standard Method for Measuring and Counting Particulate Contamination on Surfaces
Organization: | ASTM International |
Publication Date: | 10 May 2000 |
Status: | inactive |
Page Count: | 4 |
ICS Code (Properties of surfaces): | 17.040.20 |
scope:
1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.
Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.
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