ASTM International - ASTM F24-09(2015)
Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces
Organization: | ASTM International |
Publication Date: | 1 October 2015 |
Status: | inactive |
Page Count: | 4 |
ICS Code (Properties of surfaces): | 17.040.20 |
scope:
1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
abstract:
This test method establishes the standard procedures for measuring and quantizing the size distribution of particulate contamination either on, or washed from, the surface of small electron-device... View More