ASTM International - ASTM F1367-98(2011)
Standard Specification for Chromium Sputtering Targets for Thin Film Applications (Withdrawn 2020)
| Organization: | ASTM International |
| Publication Date: | 1 June 2011 |
| Status: | inactive |
| Page Count: | 2 |
| ICS Code (Metallic coatings): | 25.220.40 |
scope:
1.1 This specification covers sputtering targets fabricated from chromium metal.
1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
abstract:
This specification covers sputtering targets fabricated from chromium metal for use in thin film applications. The grades of chromium covered in this specification, are based on the total metallic... View More
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