ASTM International - ASTM F1367-98
Standard Specification for Chromium Sputtering Targets for Thin Film Applications
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| Organization: | ASTM International |
| Publication Date: | 10 August 1998 |
| Status: | inactive |
| Page Count: | 2 |
| ICS Code (Metallic coatings): | 25.220.40 |
scope:
1.1 This specification covers sputtering targets fabricated from chromium metal.
1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.
1.3 The values stated in SI units are regarded as standard.
Document History
June 1, 2011
Standard Specification for Chromium Sputtering Targets for Thin Film Applications (Withdrawn 2020)
This specification covers sputtering targets fabricated from chromium metal for use in thin film applications. The grades of chromium covered in this specification, are based on the total metallic...
August 10, 1998
Standard Specification for Chromium Sputtering Targets for Thin Film Applications
This specification covers sputtering targets fabricated from chromium metal for use in thin film applications. The grades of chromium covered in this specification, are based on the total metallic...
ASTM F1367-98
August 10, 1998
Standard Specification for Chromium Sputtering Targets for Thin Film Applications
1.1 This specification covers sputtering targets fabricated from chromium metal.
1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements....
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