scope:

1.1 This guide covers the acquainting of the XPS user with the various charge control and charge shift referencing techniques that are and have been used in the acquisition and interpretation of X-ray photoelectron spectroscopy (XPS) data from surfaces of insulating specimens.

1.2 This guide is intended to apply to charge control and charge referencing techniques in XPS and is not necessarily applicable to electron-excited systems.

1.3 SI units are standard unless otherwise noted.

1.4 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.