ASTM International - ASTM F816-83(1998)e1
Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages
|Publication Date:||10 May 1998|
|ICS Code (Electronic components in general):||31.020|
1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.