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ASTM International - ASTM E1127-08(2015)

Standard Guide for Depth Profiling in Auger Electron Spectroscopy

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Organization: ASTM International
Publication Date: 1 June 2015
Status: active
Page Count: 5
ICS Code (Physicochemical methods of analysis): 71.040.50
significance And Use:

5.1 Auger electron spectroscopy yields information concerning the chemical and physical state of a solid surface in the near surface region. Nondestructive depth profiling is limited to this near... View More

scope:

1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

  Section
Ion Sputtering  6
Angle Lapping and Cross-Sectioning  7
Mechanical Cratering  8
Mesh Replica Method 9
Nondestructive Depth Profiling  10

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.4 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

ASTM E1127-08(2015)
June 1, 2015
Standard Guide for Depth Profiling in Auger Electron Spectroscopy
1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy. 1.2 Guidelines are given for depth profiling by the following:   Section Ion Sputtering  6 Angle...
October 1, 2008
Standard Guide for Depth Profiling in Auger Electron Spectroscopy
1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy. 1.2 Guidelines are given for depth profiling by the following: Section Ion Sputtering 6 Angle Lapping...
May 10, 2003
Standard Guide for Depth Profiling in Auger Electron Spectroscopy
Auger electron spectroscopy yields information concerning the chemical and physical state of a solid surface in the near surface region. Nondestructive depth profiling is limited to this near surface...
September 10, 1997
Standard Guide for Depth Profiling in Auger Electron Spectroscopy
1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy. 1.2 Guidelines are given for depth profiling by the following: Section Ion Sputtering 6 Angle Lapping and...
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