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JEDEC JEP 144

Guideline for Residual Gas Analysis (RGA) for Microelectronic Packages

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Organization: JEDEC
Publication Date: 1 July 2002
Status: inactive
Page Count: 34
scope:

The intent of this document is to give guidance on the Residual Gas Analysis (RGA) process and surrounding issues. The guideline describes how to select a suitable test lab and includes RGA history, measurement methodology, and issues that arise with the test. Interpreting the lab results along with common failure mechanisms are discussed at length along with process controls and alternative test techniques for measuring the moisture content within packages. 

Document History

November 1, 2011
Guideline for Internal Gas Analysis for Microelectronic Packages
This guideline is applicable to hermetically sealed microelectronic components (including discrete semiconductors, monolithic and hybrid microcircuits). Specific cases with unique packaging,...
JEDEC JEP 144
July 1, 2002
Guideline for Residual Gas Analysis (RGA) for Microelectronic Packages
The intent of this document is to give guidance on the Residual Gas Analysis (RGA) process and surrounding issues. The guideline describes how to select a suitable test lab and includes RGA history,...
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