CENELEC - EN 62047-21
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
active, Most Current
| Organization: | CENELEC |
| Publication Date: | 1 September 2014 |
| Status: | active |
| Page Count: | 18 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This part of IEC 62047 specifies the determination of Poisson's
ratio from the test results obtained by the application of uniaxial
and biaxial loads to thin-film micro-electromechani
Document History
EN 62047-21
September 1, 2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems...