scope:

In essence, the present guideline deals with particulate, chemical (molecular) emissions and electrostatic characteristics of materials and the cleanability of material surfaces. Biological and radiological surface contaminations are not the specific topic of this guideline; the same holds for process media.

Note: Process media are dealt with in guidelines VDI 2083 Part 7 (purity of media) and Part 10 (ultrapure media supply systems), water in VDI 2083 Part 13.1, Part 13.2 and Part 13.3, biocontamination in VDI 2083 Part 18.

This guideline provides definitions for the compatibility of materials with the required cleanliness and for the cleanroom suitability of materials. The classifications and the procedures for determining the suitability for use in clean production environments are based on these definitions.

This guideline does not address the evaluation of tools, which has been dealt with in VDI 2083 Part 9.1. Tools are a subset of materials.

This guideline considers but volatile organic compounds (VOC); VVOC and SVOC are not addressed.

Where particle emission behaviour is concerned, this guideline looks at material pairs only, individual materials at rest not generally causing particle emissions. Friction occurs where solid bodies are in contact with at least one other solid body. Friction processes are generally linked to particle generation processes.