scope:

Guideline VDI 2083 Part 1 contains, in terms of formulae, tables and graphs, the classification of air cleanliness in cleanrooms and associated controlled environments. This guideline exclusively refers to the permissible concentrations of airborne particles at the "clean workplace".

Based on the classification in DIN EN ISO 14644, only particles of sizes in the range from 0,1 μm to 5 μm are considered.

Part 1 of this guideline does not refer to the classification of particles lying outside the specified range of sizes from 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1 μm) and macroparticles (particles larger than 5 μm) can be described in terms of the U- and M-descriptors, respectively (see DIN EN ISO 14644-1, Annex E).

The characterisation of the physical, chemical, radiological or viable property of airborne particles is not covered by this guideline.

It is the objective of cleanroom technology, as defined in this guideline, to enable processes requiring a defined protection from influences of the environment.

Controlling the various influences of the environment requires a comprehensive concept the elements of which are dealt with in the individual parts of VDI 2083. Figure 1 illustrates these elements in a schematic and makes reference to those parts of the guideline which deal with these elements.

The classification of particulate air cleanliness - the subject of this guideline - gains particular importance by being used to characterise all types of cleanrooms, clean areas and occupancy states.

Particulate air cleanliness is determined by the following influencing quantities:

• particles released by personnel
• particles released by the process
• airborne particles introduced and removed by the HVAC system