scope:

This VDI guideline essentially deals with particulate contamination. Chemical (molecular), biological and radiological surface contamination is not a specific issue in this guideline; the same holds true for process media.

Note: Process media are considered in the guidelines VDI 2083 Part 7, Part 9 and Part 10.

This guideline provides definitions of the terms "compatibility with the required cleanliness" and cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (see Figure 3). Furthermore, it describes the outgassing and electrostatic characteristics of equipment and air-handling components associated with controlled environments. Surface cleanliness and its classification are also within the scope of this guideline.

The compatibility of a piece of equipment with the required cleanliness includes all contaminations relevant to the process. The measuring techniques described in this guideline, serving to assess the compatibility of equipment with the required cleanliness comprise cleanroom compatibility, surface particulate cleanliness, outgassing behaviour and the electrostatic behaviour.

This guideline is applicable to equipment brought into the cleanroom and to air-handling components.