Standard Guide for Depth Profiling in Auger Electron Spectroscopy
|Publication Date:||1 October 2008|
|ICS Code (Physicochemical methods of analysis):||71.040.50|
This guide covers procedures used for depth profiling in Auger electron spectroscopy.
Guidelines are given for depth profiling
The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.