BSI - BS EN 62047-17
Semiconductor devices — Micro-electromechanical devices Part 17: Bulge test method for measuring mechanical properties of thin films
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| Organization: | BSI |
| Publication Date: | 31 July 2015 |
| Status: | active |
| Page Count: | 34 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
BS EN 62047-17
July 31, 2015
Semiconductor devices — Micro-electromechanical devices Part 17: Bulge test method for measuring mechanical properties of thin films
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