ISO 13083
Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
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| Organization: | ISO |
| Publication Date: | 15 August 2015 |
| Status: | active |
| Page Count: | 22 |
| ICS Code (Chemical analysis): | 71.040.40 |
scope:
This International Standard describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
Document History
ISO 13083
August 15, 2015
Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
This International Standard describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which...