ISO 14644-2
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
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| Organization: | ISO |
| Publication Date: | 15 December 2015 |
| Status: | active |
| Page Count: | 22 |
| ICS Code (Cleanrooms and associated controlled environments): | 13.040.35 |
scope:
This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1μm) will be addressed in a separate standard.
Document History
ISO 14644-2
December 15, 2015
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that...
September 15, 2000
Cleanrooms and Associated Controlled Environments - Part 2: Specifications for Testing and Monitoring to Prove Continued Compliance with ISO 14644-1
This part of ISO 14644 specifies requirements for periodic testing of a cleanroom or clean zone to prove its continued compliance with ISO 14644-1 for the designated classification of airborne...