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ISO - 14644-9

Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration

active, Most Current
Organization: ISO
Publication Date: 1 May 2022
Status: active
Page Count: 34
ICS Code (Cleanrooms and associated controlled environments): 13.040.35
scope:

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.

This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 μm and 500 μm.

The following issues are not considered in this document:

- requirements for the cleanliness and suitability of surfaces for specific processes;

- procedures for the cleaning of surfaces;

- material characteristics;

- references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;

- selection and use of statistical methods for assessment and testing;

- other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.

Document History

14644-9
May 1, 2022
Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing...
August 15, 2012
Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
This part of ISO 14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications....

References

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