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BSI - BS ISO 15471

Surface chemical analysis - Auger electron spectroscopy - Description of selected instrumental performance parameters

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Organization: BSI
Publication Date: 30 September 2016
Status: active
Page Count: 16
ICS Code (Chemical analysis): 71.040.40

Document History

BS ISO 15471
September 30, 2016
Surface chemical analysis - Auger electron spectroscopy - Description of selected instrumental performance parameters
A description is not available for this item.
BS ISO 15471
March 30, 2005
Surface chemical analysis - Auger electron spectroscopy - Description of selected instrumental performance parameters
A description is not available for this item.

References

This document references:
ISO 21270 - Surface chemical analysis X-ray photoelectron and Auger electron spectrometers Linearity of intensity scale
Published by ISO on June 1, 2004
A description is not available for this item.
This document references:
ISO TR 19319 - Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
Published by ISO on March 15, 2013
This Technical Report describes: a) Functions and their relevance to lateral resolution: 1) Point spread function (PSF) 2) Line spread function (LSF) 3) Edge spread function (ESF) 4) Modulation...
This document references:
ISO 21270 - Surface chemical analysis X-ray photoelectron and Auger electron spectrometers Linearity of intensity scale
Published by ISO on June 1, 2004
A description is not available for this item.
This document references:
ISO TR 19319 - Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
Published by ISO on March 15, 2013
This Technical Report describes: a) Functions and their relevance to lateral resolution: 1) Point spread function (PSF) 2) Line spread function (LSF) 3) Edge spread function (ESF) 4) Modulation...
This document is referenced by:
BS ISO 20903 - Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Methods used to determine peak intensities and information required when reporting results
Published by BSI on February 28, 2019
A description is not available for this item.
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