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BSI - BS EN 62047-6

Semiconductor devices - Micro-electromechanical devices Part 6: Axial fatigue testing methods of thin film materials

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Organization: BSI
Publication Date: 30 April 2010
Status: active
Page Count: 20
ICS Code (Other semiconductor devices): 31.080.99

Document History

BS EN 62047-6
April 30, 2010
Semiconductor devices - Micro-electromechanical devices Part 6: Axial fatigue testing methods of thin film materials
A description is not available for this item.

References

This document references:
IEC 62047-2 - Semiconductor devices – Micro-electromechanical devices – Part 2: Tensile testing method of thin film materials
Published by IEC on August 1, 2006
This International Standard specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 μm, which are main structural materials for...
This document references:
BS EN 62047-2 - Semiconductor devices Micro-electromechanical devices Part 2: Tensile testing method of thin film materials
Published by BSI on November 30, 2006
A description is not available for this item.
This document references:
EN 62047-2 - Semiconductor devices Micro-electromechanical devices Part 2: Tensile testing method of thin film materials
Published by CENELEC on September 1, 2006
A description is not available for this item.
This document references:
ASTM E1823 - Standard Terminology Relating to Fatigue and Fracture Testing
Published by ASTM on November 15, 2020
This terminology contains definitions, definitions of terms specific to certain standards, symbols, and abbreviations approved for use in standards on fatigue and fracture testing. The definitions...
This document references:
E466 - Standard Practice for Conducting Force Controlled Constant Amplitude Axial Fatigue Tests of Metallic Materials
June 1, 2021
This practice covers the procedure for the performance of axial force controlled fatigue tests to obtain the fatigue strength of metallic materials in the fatigue regime where the strains are...
This document references:
ISO 12107 - Metallic materials - Fatigue testing - Statistical planning and analysis of data
Published by ISO on August 15, 2012
Objectives This International Standard presents methods for the experimental planning of fatigue testing and the statistical analysis of the resulting data. The purpose is to determine the fatigue...
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