scope:

This Standard specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.

Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test apparatus and test procedures for determining performance parameters. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this Standard may be used if based on agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.

NOTE: The International Standard corresponding to this Standard and the symbol of degree of correspondence are as follows:

ISO 14644-3: 2005 Cleanrooms and associated controlled environments-Part 3: Test methods (MOD)

The symbols which denote the degree of correspondence in the contents between JIS and the corresponding International Standard are IDT (identical), MOD (modified) and NEQ (not equivalent) according to ISO/lEC Guide 21.